Patent details
EP3899662 Title: METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES
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Basic Information
- Publication number:
- EP3899662
- WO Application Number:
- EP2019081282
- Type:
- European Patent Granted for NL
- Status:
- Deemed not to be granted according to art. 52.4a or 52.6 ROW
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Application number:
- EP19801044.9
- WO Publication Number:
- WO2020126242
- EPO Publication Language:
- English
- SPC Number:
- First Applicant Residence Country:
- Netherlands (NL)
- Publications:
Dates
- Filing date:
- 14/11/2019
- Grant date:
- 01/06/2022
- EP Publication Date:
- 27/10/2021
- WO Publication Date:
- 25/06/2020
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 01/06/2022
- EP B1 Publication Date:
- 01/06/2022
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 13/11/2039
- Lapsed By Expiration Date:
- Revocation Date:
- Invalidity Date:
- 01/06/2022
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
Applicant/holder
- From:
- 01/06/2022
- Name:
- ASML Netherlands B.V.
- Address:
- P.O. Box 324, 5500 AH, VELDHOVEN, Netherlands (NL)
Inventor
1
- Name:
- BRANTJES, Nicolaas Petrus Marcus
- Address:
- 5500 AH Veldhoven, Netherlands (NL)
2
- Name:
- COX, Matthijs
- Address:
- 5500 AH Veldhoven, Netherlands (NL)
3
- Name:
- MENCHTCHIKOV, Boris
- Address:
- San Jose, CA 95131, United States of America (US)
4
- Name:
- TABERY, Cyrus, Emil
- Address:
- San Jose, CA 95131, United States of America (US)
5
- Name:
- ZHANG, Youping
- Address:
- San Jose, CA 95131, United States of America (US)
6
- Name:
- ZOU, Yi
- Address:
- San Jose, CA 95131, United States of America (US)
7
- Name:
- LIN, Chenxi
- Address:
- San Jose, CA 95131, United States of America (US)
8
- Name:
- CHENG, Yana
- Address:
- San Jose, CA 95131, United States of America (US)
9
- Name:
- HASTINGS, Simon, Philip, Spencer
- Address:
- San Jose, CA 95131, United States of America (US)
10
- Name:
- GENIN, Maxime, Philippe, Frederic
- Address:
- San Jose, CA 95131, United States of America (US)
Priority
1
- Priority Patent Number:
- 201962802866 P
- Priority Date:
- 08/02/2019
- Priority Country:
- United States of America (US)
2
- Priority Patent Number:
- 18214013
- Priority Date:
- 19/12/2018
- Priority Country:
- European Patent Office (EPO) (EP)
Classification
Publication
Bulletin
1
- Bulletin Heading:
- VRV
- Journal edition number:
- 40/22
- Publication date:
- 05/10/2022
- Description:
- Lapse or annulment
2
- Bulletin Heading:
- EP2
- Journal edition number:
- 22/22
- Publication date:
- 01/06/2022
- Description:
- European patents granted for the Netherlands
European Patent Bulletin
- Issue number:
- 202222
- Publication date:
- 01/06/2022
- Description:
- Grant (B1)
Annual Fee
- Annual Fee(s) Due Date:
- Annual Fee Number:
- Last Annual Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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