Patent details

EP3440511 Title: PROCESS COMPATIBILITY IMPROVEMENT BY FILL FACTOR MODULATION

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Basic Information

Publication number:
EP3440511
WO Application Number:
US2016060626
Type:
European Patent Granted for NL
Status:
Patent in Force
Publication Title:
Title When Made Available For Viewing:
Reason Lapsed:
Application number:
EP16898139.7
WO Publication Number:
WO2017176314
EPO Publication Language:
English
SPC Number:
First Applicant Residence Country:
United States of America (US)
Publications:

Dates

Filing date:
04/11/2016
Grant date:
06/03/2024
EP Publication Date:
13/02/2019
WO Publication Date:
12/10/2017
Claims Translations Received Date:
Claims Translation B1 Received Date:
07/03/2024
Claims Translation B2 Received Date:
Claims Translation B3 Received Date:
Lapsed By Non Payment Annual Fee Date:
Renunciation Date:
NullificationDate:
Published:
Due To Cession Date:
Registration date:
06/03/2024
EP B1 Publication Date:
06/03/2024
EP B2 Publication Date:
EP B3 Publication Date:
Description Translation B1 Received Date:
Description Translation B2 Received Date:
Description Translation B3 Received Date:
Expiration date:
03/11/2036
Lapsed By Expiration Date:
Patent Validated Date:
12/03/2024
Revocation Date:
Invalidity Date:
Response To Novelty Search Report Received:
Patent Granting Request:
Lapsed date:

Applicant/holder

From:
06/03/2024
 
 

 

Name:
KLA-Tencor Corporation
Address:
One Technology Drive, Milpitas, California 95035, United States of America (US)

Agent

Name:
ir. W.J.J.M. Kempes
From:
11/03/2024
Address:
Dogio Patents Postbus 2350, 1200 CJ, Hilversum, Netherlands (NL)
To:

Inventor

1

Name:
LEVINSKI, Vladimir
Address:
23100 Migdal HaEmek, Israel (IL)

2

Name:
HAJAJ, Eitan
Address:
61000 Tel Aviv, Israel (IL)

3

Name:
ITZKOVICH, Tal
Address:
99735 Kfar Uriya, Israel (IL)

4

Name:
AHARON, Sharon
Address:
1796000 Hanaton, Israel (IL)

5

Name:
ADEL, Michael E.
Address:
30900 Ya'akov Zichron, Israel (IL)

6

Name:
PASKOVER, Yuri
Address:
Milipitas, CA 95035, United States of America (US)

7

Name:
NEGRI, Daria
Address:
Milipitas, CA 95035, Germany (DE)

8

Name:
LUBASHEVSKY, Yuval
Address:
Milipitas, CA 95035, Germany (DE)

9

Name:
MANASSEN, Amnon
Address:
Milipitas, CA 95035, Germany (DE)

10

Name:
LEE, Myungjun
Address:
Milipitas, CA 95035, Germany (DE)

11

Name:
SMITH, Mark D
Address:
Milipitas, CA 95035, Germany (DE)

Priority

Priority Patent Number:
201662318086 P
Priority Date:
04/04/2016
Priority Country:
United States of America (US)

Classification

IPC or IDT classification:
G03F 7/20; G03F 7/00; H01L 21/027; H01L 21/66;

Publication

Bulletin

1

Bulletin Heading:
EP3
Journal edition number:
11/24
Publication date:
13/03/2024
Description:
European patents granted for the Netherlands in which a translation was filed ex Article 52 par. 1 of the NL Patent Law 1995

2

Bulletin Heading:
EP2
Journal edition number:
10/24
Publication date:
06/03/2024
Description:
European patents granted for the Netherlands

European Patent Bulletin

Issue number:
202410
Publication date:
06/03/2024
Description:
Grant (B1)

Annual Fee

Annual Fee(s) Due Date:
30/11/2025
Annual Fee Number:
10
Annual Fee Amount:
400 Euro
Last Annual Payment Date:
26/11/2024
Last Annual Fee Paid Number:
9
Last Annual Fee Paid Amount:
340 Euro
Payer:
Computer Packages Inc. (CPI)
Filing date Document type Document Description Number of pages File Type
11/03/2024 Outgoing Correspondence Letter no formal defects 1 PDF /6/1/0/6/7/0800976016/docs/ep16898139.7_1_595969l271.pdf
07/03/2024 Claims First filed claims 2 PDF /6/1/0/6/7/0800976016/docs/ep16898139.7_0_claims20240307094607735.pdf