Patent details
EP3377942 Title: LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A LITHOGRAPHIC APPARATUS
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Basic Information
- Publication number:
- EP3377942
- WO Application Number:
- EP2016073380
- Type:
- European Patent Granted for NL
- Status:
- Deemed not to be granted according to art. 52.4a or 52.6 ROW
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Application number:
- EP16787344.7
- WO Publication Number:
- WO2017084797
- EPO Publication Language:
- English
- SPC Number:
- First Applicant Residence Country:
- Netherlands (NL)
- Publications:
Dates
- Filing date:
- 30/09/2016
- Grant date:
- 20/12/2023
- EP Publication Date:
- 26/09/2018
- WO Publication Date:
- 26/05/2017
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 20/12/2023
- EP B1 Publication Date:
- 20/12/2023
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 29/09/2036
- Lapsed By Expiration Date:
- Revocation Date:
- Invalidity Date:
- 20/12/2023
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
Applicant/holder
- From:
- 20/12/2023
- Name:
- ASML Netherlands B.V.
- Address:
- P.O. Box 324, 5500 AH, VELDHOVEN, Netherlands (NL)
Inventor
1
- Name:
- KANEHARA, Junichi
- Address:
- 5500 AH Veldhoven, Netherlands (NL)
2
- Name:
- BUTLER, Hans
- Address:
- 5500 AH Veldhoven, Netherlands (NL)
3
- Name:
- DE WIT, Paul Corné Henri
- Address:
- 5500 AH Veldhoven, Netherlands (NL)
4
- Name:
- VAN DER PASCH, Engelbertus Antonius Fransiscus
- Address:
- 5500 AH Veldhoven, Netherlands (NL)
Priority
1
- Priority Patent Number:
- 16157155
- Priority Date:
- 24/02/2016
- Priority Country:
- European Patent Office (EPO) (EP)
2
- Priority Patent Number:
- 15195532
- Priority Date:
- 20/11/2015
- Priority Country:
- European Patent Office (EPO) (EP)
Classification
- IPC or IDT classification:
- G03F 7/20;
Publication
Bulletin
1
- Bulletin Heading:
- VRV
- Journal edition number:
- 17/24
- Publication date:
- 24/04/2024
- Description:
- Lapse or annulment
2
- Bulletin Heading:
- EP2
- Journal edition number:
- 51/23
- Publication date:
- 20/12/2023
- Description:
- European patents granted for the Netherlands
European Patent Bulletin
- Issue number:
- 202351
- Publication date:
- 20/12/2023
- Description:
- Grant (B1)
Annual Fee
- Annual Fee(s) Due Date:
- Annual Fee Number:
- Last Annual Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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