Patent details
EP3295477 Title: SYSTEMS AND METHODS FOR OBLIQUE INCIDENCE SCANNING WITH 2D ARRAY OF SPOTS
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Basic Information
- Publication number:
- EP3295477
- WO Application Number:
- US2016030838
- Type:
- European Patent Granted for NL
- Status:
- Patent in Force
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Application number:
- EP16793208.6
- WO Publication Number:
- WO2016182820
- EPO Publication Language:
- English
- SPC Number:
- First Applicant Residence Country:
- United States of America (US)
- Publications:
Dates
- Filing date:
- 04/05/2016
- Grant date:
- 15/12/2021
- EP Publication Date:
- 21/03/2018
- WO Publication Date:
- 17/11/2016
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- 16/12/2021
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 15/12/2021
- EP B1 Publication Date:
- 15/12/2021
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 03/05/2036
- Lapsed By Expiration Date:
- Patent Validated Date:
- 21/01/2022
- Revocation Date:
- Invalidity Date:
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
Applicant/holder
- From:
- 15/12/2021
- Name:
- KLA - Tencor Corporation
- Address:
- One Technology Drive, Milpitas, California 95035, United States of America (US)
Agent
- Name:
- ir. W.J.J.M. Kempes
- From:
- 19/01/2022
- Address:
- Dogio Patents Postbus 2350, 1200 CJ, Hilversum, Netherlands (NL)
- To:
Inventor
1
- Name:
- SULLIVAN, Jamie
- Address:
- Eugene, Oregon 97405, United States of America (US)
2
- Name:
- CHURIN, Yevgeniy
- Address:
- San Jose, California 95132, United States of America (US)
Priority
1
- Priority Patent Number:
- 201514982747
- Priority Date:
- 29/12/2015
- Priority Country:
- United States of America (US)
2
- Priority Patent Number:
- 201562159173 P
- Priority Date:
- 08/05/2015
- Priority Country:
- United States of America (US)
Classification
- IPC or IDT classification:
- G01N 21/956; G01N 21/95; G01N 21/88; G02B 21/00; G02B 27/10; G02B 21/06; G02B 27/09; G02B 27/42; G02F 1/33; G02B 26/10; G02B 27/12;
Publication
Bulletin
1
- Bulletin Heading:
- EP3
- Journal edition number:
- 04/22
- Publication date:
- 26/01/2022
- Description:
- European patents granted for the Netherlands in which a translation was filed ex Article 52 par. 1 of the NL Patent Law 1995
2
- Bulletin Heading:
- EP2
- Journal edition number:
- 50/21
- Publication date:
- 15/12/2021
- Description:
- European patents granted for the Netherlands
European Patent Bulletin
- Issue number:
- 202150
- Publication date:
- 15/12/2021
- Description:
- Grant (B1)
Annual Fee
- Annual Fee(s) Due Date:
- 31/05/2026
- Annual Fee Number:
- 11
- Annual Fee Amount:
- 500 Euro
- Last Annual Payment Date:
- 26/05/2025
- Last Annual Fee Paid Number:
- 10
- Last Annual Fee Paid Amount:
- 400 Euro
- Payer:
- Computer Packages Inc. (CPI)
| Filing date | Document type | Document Description | Number of pages | File Type | ||
|---|---|---|---|---|---|---|
| 20/01/2022 | Outgoing Correspondence | Letter no formal defects | 1 | /1/0/6/2/5/0800752601/docs/ep16793208.6_1_457365l271.pdf | ||
| 16/12/2021 | Claims | First filed claims | 5 | /1/0/6/2/5/0800752601/docs/ep16793208.6_0_claims20211216124505441.pdf |