Patent details
EP2699966 Title: NETWORK ARCHITECTURE AND PROTOCOL FOR CLUSTER OF LITHOGRAPHY MACHINES
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Basic Information
- Publication number:
- EP2699966
- WO Application Number:
- EP2012057366
- Type:
- European Patent Granted for NL
- Status:
- Deemed not to be granted according to art. 52.4a or 52.6 ROW
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Application number:
- EP12716017.4
- WO Publication Number:
- WO2012143548
- EPO Publication Language:
- English
- SPC Number:
- First Applicant Residence Country:
- Netherlands (NL)
- Publications:
Dates
- Filing date:
- 23/04/2012
- Grant date:
- 07/04/2021
- EP Publication Date:
- 26/02/2014
- WO Publication Date:
- 26/10/2012
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 07/04/2021
- EP B1 Publication Date:
- 07/04/2021
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 22/04/2032
- Lapsed By Expiration Date:
- Revocation Date:
- Invalidity Date:
- 07/04/2021
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
Applicant/holder
- From:
- 07/04/2021
- Name:
- ASML Netherlands B.V.
- Address:
- De Run 6501, 5504 DR Veldhoven, Netherlands (NL)
Inventor
1
- Name:
- VAN KERVINCK, Marcel Nicolaas Jacobus
- Address:
- NL-2595 BV Den Haag, Netherlands (NL)
2
- Name:
- DE BOER, Guido
- Address:
- NL-4143 LN Leerdam, Netherlands (NL)
Priority
1
- Priority Patent Number:
- 201161533673 P
- Priority Date:
- 12/09/2011
- Priority Country:
- United States of America (US)
2
- Priority Patent Number:
- 201161478117 P
- Priority Date:
- 22/04/2011
- Priority Country:
- United States of America (US)
Classification
- IPC or IDT classification:
- G03F 7/20; H01J 37/317;
Publication
Bulletin
1
- Bulletin Heading:
- VRV
- Journal edition number:
- 37/21
- Publication date:
- 15/09/2021
- Description:
- Lapse or annulment
2
- Bulletin Heading:
- EP2
- Journal edition number:
- 14/21
- Publication date:
- 07/04/2021
- Description:
- European patents granted for the Netherlands
European Patent Bulletin
- Issue number:
- 202114
- Publication date:
- 07/04/2021
- Description:
- Grant (B1)
Annual Fee
- Annual Fee(s) Due Date:
- Annual Fee Number:
- Last Annual Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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