Patent details
EP2690496 Title: METHOD FOR MEASURING DISTORTION OF PROJECTION OBJECTIVE
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Basic Information
- Publication number:
- EP2690496
- WO Application Number:
- CN2012072693
- Type:
- European Patent Granted for NL
- Status:
- Patent in Force
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Application number:
- EP12761311.5
- WO Publication Number:
- WO2012126364
- EPO Publication Language:
- English
- SPC Number:
- First Applicant Residence Country:
- China (CN)
- Publications:
Dates
- Filing date:
- 21/03/2012
- Grant date:
- 17/08/2016
- EP Publication Date:
- 29/01/2014
- WO Publication Date:
- 27/09/2012
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- 25/08/2016
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 17/08/2016
- EP B1 Publication Date:
- 17/08/2016
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 20/03/2032
- Lapsed By Expiration Date:
- Revocation Date:
- Invalidity Date:
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
Applicant/holder
- From:
- 19/02/2018
- Name:
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Address:
- No. 1525 Zhangdong Road Zhangjiang High-Tech Park, 201203, SHANGHAI , China (CN)
Historical Applicant/holder
- From:
- 17/08/2016
- To:
- 19/02/2018
- Name:
- Shanghai Micro Electronics Equipment Co., Ltd.
- Address:
- 1525 Zhangdong Road Pudong New Area, SHANGHAI 201203, China (CN)
Domicile Holder
- Name:
- dr. ir. G.J.C. Verdijck c.s.
- From:
- 18/08/2016
- Address:
- Octrooibureau Arnold & Siedsma p/a Postbus 18558, 2502 EN, Den Haag, Netherlands (NL)
- To:
Inventor
1
- Name:
- FANG, Li
- Address:
- Shanghai 201203, China (CN)
2
- Name:
- SUN, Gang
- Address:
- Shanghai 201203, China (CN)
3
- Name:
- MIN, Jinhua
- Address:
- Shanghai 201203, China (CN)
4
- Name:
- ZHANG, Jun
- Address:
- Shanghai 201203, China (CN)
Priority
- Priority Patent Number:
- 201110068060
- Priority Date:
- 21/03/2011
- Priority Country:
- China (CN)
Classification
- IPC or IDT classification:
- G03F 7/20; H01L 21/66; G03F 1/44;
Publication
Bulletin
1
- Bulletin Heading:
- CO
- Journal edition number:
- 14/18
- Publication date:
- 28/03/2018
- Description:
- Changes in the Netherlands Patent Register
2
- Bulletin Heading:
- EP3
- Journal edition number:
- 35/16
- Publication date:
- 31/08/2016
- Description:
- European patents granted for the Netherlands in which a translation was filed ex Article 52 par. 1 of the NL Patent Law 1995
3
- Bulletin Heading:
- EP2
- Journal edition number:
- 33/16
- Publication date:
- 17/08/2016
- Description:
- European patents granted for the Netherlands
European Patent Bulletin
- Issue number:
- 201633
- Publication date:
- 17/08/2016
- Description:
- Grant (B1)
Deed
Change of owner(s)
- Change Kind/ Decision Type:
- Change of owner(s) name
- Deed Number:
- RC201800345A
- Date Registered:
- 19/02/2018
- License Effective Date:
- License Expiration Date:
- Scope of License:
- Deed Filer:
- ir. H.Th. van den Heuvel c.s.
- Journal Edition Number:
- Text:
- Deed Status:
- Country Code:
- Updated License Number:
- Terminated License Number:
Added Owner(s)
- Name:
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Address:
- No. 1525 Zhangdong Road Zhangjiang High-Tech Park, 201203, SHANGHAI , China (CN)
Changed Pledgee
- Name:
- Address:
Removed Usufructuary
- Name:
- Address:
Added Usufructuary
- Name:
- Address:
Changed Usufructuary
- Name:
- Address:
Annual Fee
- Annual Fee(s) Due Date:
- 31/03/2025
- Annual Fee Number:
- 14
- Annual Fee Amount:
- 800 Euro
- Last Annual Payment Date:
- 20/03/2024
- Last Annual Fee Paid Number:
- 13
- Last Annual Fee Paid Amount:
- 700 Euro
- Payer:
- PAVIS GmbH
| Filing date | Document type | Document Description | Number of pages | File Type | ||
|---|---|---|---|---|---|---|
| 22/03/2018 | Outgoing Correspondence | Letter registration deed | 1 | /4/2/6/0/8/0800080624/docs/ep12761311.5_0_199848l118.pdf | ||
| 19/02/2018 | Request for Change | First filed deed | 6 | /4/2/6/0/8/0800080624/docs/ep12761311.5_4_rfc20180220024406352.pdf | ||
| 29/08/2016 | Outgoing Correspondence | Letter no formal defects | 1 | /4/2/6/0/8/0800080624/docs/ep12761311.5_3_78670l271.pdf | ||
| 25/08/2016 | Claims | First filed claims | 5 | /4/2/6/0/8/0800080624/docs/ep12761311.5_1_claims20160825153951402.pdf | ||
| 25/08/2016 | Incoming Correspondence Electronic | Accompanying letter incoming document | 2 | /4/2/6/0/8/0800080624/docs/ep12761311.5_2_incomingcorrespondenceelectronic20160825153951926.pdf | ||
| 18/08/2016 | Incoming Correspondence Electronic | Accompanying letter incoming document | 1 | /4/2/6/0/8/0800080624/docs/ep12761311.5_5_incomingcorrespondenceelectronic20160819093924530.pdf |