Patent details
EP2428541 Title: Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films
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Basic Information
- Publication number:
- EP2428541
- WO Application Number:
- Type:
- European Patent Granted for NL
- Status:
- Deemed not to be granted according to art. 52.4a or 52.6 ROW
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Application number:
- EP11179985.4
- WO Publication Number:
- EPO Publication Language:
- English
- SPC Number:
- First Applicant Residence Country:
- Germany (DE)
- Publications:
Dates
- Filing date:
- 05/09/2011
- Grant date:
- 06/03/2019
- EP Publication Date:
- 14/03/2012
- WO Publication Date:
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 06/03/2019
- EP B1 Publication Date:
- 06/03/2019
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 04/09/2031
- Lapsed By Expiration Date:
- Revocation Date:
- Invalidity Date:
- 06/03/2019
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
Applicant/holder
- From:
- 06/03/2019
- Name:
- BASF SE
- Address:
- Carl-Bosch-Strasse 38, 67056 Ludwigshafen am Rhein, Germany (DE)
Inventor
1
- Name:
- Li, Yuzhuo
- Address:
- 69123 Heidelberg, Germany (DE)
2
- Name:
- Chu, Jea-Ju
- Address:
- Shilin District, Taipei City 111, Taiwan, Chinese Taipei (TW)
3
- Name:
- Venkataraman, Shyam Sundar
- Address:
- Zhongli City Taoyuan County 320, Taiwan, Chinese Taipei (TW)
4
- Name:
- Chiu, Wei Lan William
- Address:
- Taipei City, Taiwan, Chinese Taipei (TW)
5
- Name:
- Pinder, Harvey Wayne
- Address:
- Chicago, IL 60659, United States of America (US)
Priority
- Priority Patent Number:
- 380719 P
- Priority Date:
- 08/09/2010
- Priority Country:
- United States of America (US)
Classification
- IPC or IDT classification:
- C09G 1/02; C09K 3/14; C09K 13/00; H01L 21/3105;
Publication
Bulletin
1
- Bulletin Heading:
- VRV
- Journal edition number:
- 28/19
- Publication date:
- 10/07/2019
- Description:
- Lapse or annulment
2
- Bulletin Heading:
- EP2
- Journal edition number:
- 10/19
- Publication date:
- 06/03/2019
- Description:
- European patents granted for the Netherlands
European Patent Bulletin
- Issue number:
- 201910
- Publication date:
- 06/03/2019
- Description:
- Grant (B1)
Annual Fee
- Annual Fee(s) Due Date:
- Annual Fee Number:
- Last Annual Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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