Patent details
EP2304769 Title: METHOD FOR AUTOMATIC MEASUREMENT AND FOR TEACHING-IN OF LOCATION POSITIONS OF OBJECTS WITHIN A SUBSTRATE PROCESSING SYSTEM BY MEANS OF SENSOR CARRIERS AND ASSOCIATED SENSOR CARRIER.
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Basic Information
- Publication number:
- EP2304769
- WO Application Number:
- Type:
- European Patent Granted for NL
- Status:
- Patent in Force
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Application number:
- EP10714188.9
- WO Publication Number:
- EPO Publication Language:
- English
- SPC Number:
- First Applicant Residence Country:
- Germany (DE)
- Publications:
Dates
- Filing date:
- 09/04/2010
- Grant date:
- 27/11/2013
- EP Publication Date:
- 27/11/2013
- WO Publication Date:
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 27/11/2013
- EP B1 Publication Date:
- 27/11/2013
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- 10/01/2014
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 08/04/2030
- Lapsed By Expiration Date:
- Revocation Date:
- Invalidity Date:
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
Applicant/holder
- From:
- 27/11/2013
- Name:
- Aes Motomation GmbH
- Address:
- Nikolaus-Otto-Strasse 8, 40670 MEERBUSCH, Germany (DE)
Domicile Holder
- Name:
- ir. A. Blokland c.s.
- From:
- 27/11/2013
- Address:
- Algemeen Octrooi- en Merkenbureau B.V. Postbus 645, 5600 AP, Eindhoven, Netherlands (NL)
- To:
Inventor
1
- Name:
- HERTGENS, Andreas
- Address:
- 41352 KORSCHENBROICH, Germany (DE)
2
- Name:
- MUELLER, Torsten
- Address:
- 47647 KERKEN, Germany (DE)
3
- Name:
- WALTNER, Paul
- Address:
- 40670 MEERBUSCH, Germany (DE)
Priority
- Priority Patent Number:
- 102009016811
- Priority Date:
- 09/04/2009
- Priority Country:
- Germany (DE)
Classification
- Main IPC Class:
- H01L 21/67;
- IPC or IDT classification:
- H01L 21/68;
Publication
Bulletin
1
- Bulletin Heading:
- EP3
- Journal edition number:
- 2014/04
- Publication date:
- 22/01/2014
- Description:
- European patents granted for the Netherlands in which a translation was filed ex Article 52 par. 1 of the NL Patent Law 1995
2
- Bulletin Heading:
- EP2
- Journal edition number:
- 2013/49
- Publication date:
- 04/12/2013
- Description:
- European patents granted for the Netherlands
European Patent Bulletin
- Issue number:
- 201348
- Publication date:
- 27/11/2013
- Description:
- Grant (B1)
Annual Fee
- Annual Fee(s) Due Date:
- 30/04/2025
- Annual Fee Number:
- 16
- Annual Fee Amount:
- 1000 Euro
- Last Annual Payment Date:
- 22/04/2024
- Last Annual Fee Paid Number:
- 15
- Last Annual Fee Paid Amount:
- 900 Euro
- Payer:
- PAVIS GmbH
| Filing date | Document type | Document Description | Number of pages | File Type | ||
|---|---|---|---|---|---|---|
| 15/01/2014 | Outgoing Correspondence | Outgoing Letter | 1 | /8/8/1/4/1/0510714188/docs/ep10714188.9_4_outgoingcorrespondence20140115.pdf | ||
| 10/01/2014 | Incoming Correspondence Paper | Accompanying letter incoming document | 1 | /8/8/1/4/1/0510714188/docs/ep10714188.9_0_incomingcorrespondencepaper20140110.pdf | ||
| 10/01/2014 | Claims | Translated claims | 5 | /8/8/1/4/1/0510714188/docs/ep10714188.9_1_claims20140110.pdf | ||
| 10/01/2014 | Incoming Correspondence Paper | Accompanying letter incoming document | 2 | /8/8/1/4/1/0510714188/docs/ep10714188.9_2_incomingcorrespondencepaper20140110.pdf | ||
| 10/01/2014 | Outgoing Correspondence | Outgoing Letter | 1 | /8/8/1/4/1/0510714188/docs/ep10714188.9_3_outgoingcorrespondence20140110.pdf |