Patent details
EP1598855 Title: EXPOSURE APPARATUS AND METHOD, AND METHOD OF PRODUCING APPARATUS.
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Basic Information
- Publication number:
- EP1598855
- WO Application Number:
- Type:
- European Patent Granted for NL
- Status:
- Expired. Art. 36.6 ROW
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Application number:
- EP04714910.9
- WO Publication Number:
- EPO Publication Language:
- English
- SPC Number:
- First Applicant Residence Country:
- Japan (JP)
- Publications:
Dates
- Filing date:
- 26/02/2004
- Grant date:
- 22/04/2015
- EP Publication Date:
- 22/04/2015
- WO Publication Date:
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- 24/04/2017
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 22/04/2015
- EP B1 Publication Date:
- 22/04/2015
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- 07/07/2015
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 25/02/2024
- Lapsed By Expiration Date:
- 26/02/2024
- Revocation Date:
- Invalidity Date:
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
Applicant/holder
- From:
- 22/04/2015
- Name:
- Nikon Corporation
- Address:
- 12-1, Yurakucho 1-chome Chiyoda-ku, TOKYO 100-8331, Japan (JP)
Domicile Holder
- Name:
- dr. ir. G.J.C. Verdijck c.s.
- From:
- 22/04/2015
- Address:
- Octrooibureau Arnold & Siedsma p/a Postbus 18558, 2502 EN, Den Haag, Netherlands (NL)
- To:
Inventor
1
- Name:
- Nagasaka, Hiroyuki
- Address:
- CHIYODA-KU, TOKYO 100-8331, Japan (JP)
2
- Name:
- Owa, Soichi
- Address:
- CHIYODA-KU, TOKYO 100-8331, Japan (JP)
3
- Name:
- Nishii, Yasufumi
- Address:
- CHIYODA-KU, TOKYO 100-8331, Japan (JP)
Priority
1
- Priority Patent Number:
- 2003320100
- Priority Date:
- 11/09/2003
- Priority Country:
- Japan (JP)
2
- Priority Patent Number:
- 2003110748
- Priority Date:
- 15/04/2003
- Priority Country:
- Japan (JP)
3
- Priority Patent Number:
- 2003049365
- Priority Date:
- 26/02/2003
- Priority Country:
- Japan (JP)
Classification
- Main IPC Class:
- H01L 21/027;
- IPC or IDT classification:
- G03F 7/20;
Publication
Bulletin
1
- Bulletin Heading:
- VRV
- Journal edition number:
- 09/24
- Publication date:
- 28/02/2024
- Description:
- Lapse or annulment
2
- Bulletin Heading:
- EP3
- Journal edition number:
- 2015/30
- Publication date:
- 22/07/2015
- Description:
- European patents granted for the Netherlands in which a translation was filed ex Article 52 par. 1 of the NL Patent Law 1995
3
- Bulletin Heading:
- EP2
- Journal edition number:
- 2015/19
- Publication date:
- 06/05/2015
- Description:
- European patents granted for the Netherlands
European Patent Bulletin
- Issue number:
- 201517
- Publication date:
- 22/04/2015
- Description:
- Grant (B1)
Annual Fee
- Annual Fee(s) Due Date:
- Annual Fee Number:
- Last Annual Payment Date:
- 13/01/2023
- Last Annual Fee Paid Number:
- 20
- Last Annual Fee Paid Amount:
- 1400 Euro
- Payer:
- Computer Patent Annuities Limited (CPA)
| Filing date | Document type | Document Description | Number of pages | File Type | ||
|---|---|---|---|---|---|---|
| 26/04/2017 | Outgoing Correspondence | Letter no formal defects | 1 | /0/1/9/4/1/0504714910/docs/ep04714910.9_1_134162l275.pdf | ||
| 24/04/2017 | Incoming Correspondence Electronic | Accompanying letter incoming document | 2 | /0/1/9/4/1/0504714910/docs/ep04714910.9_0_incomingcorrespondenceelectronic20170424093911624.pdf | ||
| 24/04/2017 | Incoming Correspondence Electronic | Other | 1 | /0/1/9/4/1/0504714910/docs/ep04714910.9_2_incomingcorrespondenceelectronic20170424093909566.pdf | ||
| 24/04/2017 | Claims | First filed claims | 6 | /0/1/9/4/1/0504714910/docs/ep04714910.9_7_claims20170424093910599.pdf | ||
| 14/07/2015 | Outgoing Correspondence | Outgoing Letter | 1 | /0/1/9/4/1/0504714910/docs/ep04714910.9_9_outgoingcorrespondence20150714.pdf | ||
| 07/07/2015 | Incoming Correspondence Paper | Accompanying letter incoming document | 2 | /0/1/9/4/1/0504714910/docs/ep04714910.9_3_incomingcorrespondencepaper20150707.pdf | ||
| 07/07/2015 | Claims | Translated claims | 6 | /0/1/9/4/1/0504714910/docs/ep04714910.9_5_claims20150707.pdf | ||
| 07/07/2015 | Outgoing Correspondence | Outgoing Letter | 1 | /0/1/9/4/1/0504714910/docs/ep04714910.9_6_outgoingcorrespondence20150707.pdf | ||
| 23/04/2015 | Incoming Correspondence Paper | Accompanying letter incoming document | 1 | /0/1/9/4/1/0504714910/docs/ep04714910.9_4_incomingcorrespondencepaper20150423.pdf | ||
| 23/04/2015 | Outgoing Correspondence | Outgoing Letter | 1 | /0/1/9/4/1/0504714910/docs/ep04714910.9_8_outgoingcorrespondence20150423.pdf |