Patent details
EP1561239 Title: ATOMIC LAYER DEPOSITION METHODS
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Basic Information
- Publication number:
- EP1561239
- WO Application Number:
- US2003036223
- Type:
- European Patent Granted for NL
- Status:
- Deemed not to be granted
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Application number:
- EP03783399.3
- WO Publication Number:
- WO2004044963
- EPO Publication Language:
- English
- SPC Number:
- First Applicant Residence Country:
- United States of America (US)
- Publications:
Dates
- Filing date:
- 12/11/2003
- Grant date:
- 27/04/2011
- EP Publication Date:
- 27/04/2011
- WO Publication Date:
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 27/04/2011
- EP B1 Publication Date:
- 27/04/2011
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 11/11/2023
- Lapsed By Expiration Date:
- Revocation Date:
- Invalidity Date:
- 27/04/2011
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
Applicant/holder
- From:
- 27/04/2011
- Name:
- Micron Technology, Inc.
- Address:
- 8000 South Federal Way, MS 525, BOISE, ID 83716, United States of America (US)
Inventor
1
- Name:
- DOAN, Trung, Tri
- Address:
- LOS GATON, CA 95032, United States of America (US)
2
- Name:
- BLALOCK, Guy, T.
- Address:
- EAGLE, ID 83616, United States of America (US)
3
- Name:
- SANDHU, Gurtej, S.
- Address:
- BOISE, ID 83706, United States of America (US)
Priority
- Priority Patent Number:
- 293072
- Priority Date:
- 12/11/2002
- Priority Country:
- United States of America (US)
Classification
- Main IPC Class:
- H01L 21/285;
Publication
Bulletin
1
- Bulletin Heading:
- VRV
- Journal edition number:
- 2011/32
- Publication date:
- 10/08/2011
- Description:
- Lapse or annulment
2
- Bulletin Heading:
- EP2
- Journal edition number:
- 2011/18
- Publication date:
- 04/05/2011
- Description:
- European patents granted for the Netherlands
European Patent Bulletin
- Issue number:
- 201117
- Publication date:
- 27/04/2011
- Description:
- Grant (B1)
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