Patent details
1044074 Title: Fotoresistcoating procescontrole met solventdampsensor.
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Basic Information
- Publication number:
- 1044074
- WO Application Number:
- US98026143
- Type:
- European Patent Granted for NL
- Status:
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Non-payment of the annual fee
- Application number:
- 989670922
- WO Publication Number:
- WO99029439
- EPO Publication Language:
- English
- SPC Number:
- First Applicant Residence Country:
- Netherlands (NL)
- Publications:
- EP1044074;
Dates
- Filing date:
- 08/12/1998
- Grant date:
- 20/06/2007
- EP Publication Date:
- WO Publication Date:
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 20/06/2007
- EP B1 Publication Date:
- 20/06/2007
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- 12/09/2007
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 07/12/2018
- Lapsed By Expiration Date:
- Revocation Date:
- Invalidity Date:
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
- 01/07/2009
Applicant/holder
- From:
- 20/06/2007
- Name:
- ASML Holding N.V.
- Address:
- 5503 LA Veldhoven, Netherlands (NL)
Domicile Holder
- Name:
- Ir. C.W.A.M. Klavers
- From:
- 13/09/2007
- Address:
- Octrooibureau Klavers, Postbus 1642, 1300 BP Almere, Netherlands (NL)
- To:
Inventor
1
- Name:
- Gurer, Emir
- Address:
- United States of America (US)
2
- Name:
- Litvak, Herbert
- Address:
- United States of America (US)
3
- Name:
- Savage, Richard
- Address:
- United States of America (US)
Priority
- Priority Patent Number:
- 987179
- Priority Date:
- 08/12/1997
- Priority Country:
- United States of America (US)
Classification
- IPC or IDT classification:
- B05C11/00; B05C11/02; B05D3/02; B05D3/10; B05D3/12; C23C16/00; H01L21/469;
Publication
Bulletin
1
- Bulletin Heading:
- VE4
- Journal edition number:
- 200909
- Publication date:
- 01/09/2009
- Description:
- Vervallen Europese octrooien wegens niet betalen van een jaarcijns
2
- Bulletin Heading:
- PE2
- Journal edition number:
- 200712
- Publication date:
- 03/12/2007
- Description:
- Verleende Europese octrooien die hebben voldaan aan art. 29P (ROW 1910) of art. 52 (ROW 1995)
3
- Bulletin Heading:
- PE3
- Journal edition number:
- 200712
- Publication date:
- 03/12/2007
- Description:
- Verleende Europese octrooien uit PE2 in alfabetische volgorde van namen van octrooihouders
4
- Bulletin Heading:
- TE2
- Journal edition number:
- 200709
- Publication date:
- 03/09/2007
- Description:
- Naamswijzigingen van houders van Europese octrooien overgenomen uit het Europese Octrooiblad
5
- Bulletin Heading:
- PE1
- Journal edition number:
- 200708
- Publication date:
- 01/08/2007
- Description:
- Verleende Europese octrooien in nummervolgorde
Terms/Procedural Changes
- Description:
- Termijn voor indienen vertaling Europees octrooi [EN]
- Date:
- 20/09/2007
Correspondence
1
- Sent On Date:
- 06/07/2009
- Letter Type:
- Vervalbrief [EN]
- Reference:
- To:
- ASML Holding N.V., De Run 6501, 5504 DR Veldhoven, Netherlands (NL)
2
- Received On Date:
- 12/09/2007
- Letter Type:
- Voorlopige domiciliekeuze [EN]
- Reference:
- 90.308/317
- From:
- Ir. C.W.A.M. Klavers, Octrooibureau Klavers, Postbus 1642, 1300 BP Almere, Netherlands (NL)
3
- Received On Date:
- 12/09/2007
- Letter Type:
- Vertaling Europees octrooi [EN]
- Reference:
- 90.308/317
- From:
- Ir. C.W.A.M. Klavers, Octrooibureau Klavers, Postbus 1642, 1300 BP Almere, Netherlands (NL)
4
- Sent On Date:
- 20/06/2007
- Letter Type:
- Termijnbrief [EN]
- Reference:
- BULLETIN 0725
- To:
- -
Annual Fee
- Annual Fee(s) Due Date:
- Annual Fee Number:
- Last Annual Payment Date:
- 13/12/2007
- Last Annual Fee Paid Number:
- 1
- Payer:
- Dennemeyer & Co, Luxembourg
| Filing date | Document type | Document Description | Number of pages | File Type | ||
|---|---|---|---|---|---|---|
| 12/09/2007 | Description | 23 | /8/9/2/5/4/0700845298/migrated-docs/989670922_0_description20070912.pdf | |||
| 12/09/2007 | Claims | 8 | /8/9/2/5/4/0700845298/migrated-docs/989670922_1_claims20070912.pdf | |||
| 12/09/2007 | Drawings | 3 | /8/9/2/5/4/0700845298/migrated-docs/989670922_2_drawings20070912.pdf | |||
| 12/09/2007 | Incoming Correspondence Paper | 1 | /8/9/2/5/4/0700845298/migrated-docs/989670922_3_incomingcorrespondencepaper20070912.pdf |