Patent details
EP3997520 Title: RINSE AND METHOD OF USE THEREOF FOR REMOVING EDGE PROTECTION LAYERS AND RESIDUAL METAL HARDMASK COMPONENTS
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Basic Information
- Publication number:
- EP3997520
- WO Application Number:
- EP2020068936
- Type:
- European Patent Granted for NL
- Status:
- Deemed not to be granted according to art. 52.4a or 52.6 ROW
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Application number:
- EP20737150.1
- WO Publication Number:
- WO2021004985
- EPO Publication Language:
- English
- SPC Number:
- First Applicant Residence Country:
- Germany (DE)
- Publications:
Dates
- Filing date:
- 06/07/2020
- Grant date:
- 20/12/2023
- EP Publication Date:
- 18/05/2022
- WO Publication Date:
- 14/01/2021
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 20/12/2023
- EP B1 Publication Date:
- 20/12/2023
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 05/07/2040
- Lapsed By Expiration Date:
- Revocation Date:
- Invalidity Date:
- 20/12/2023
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
Applicant/holder
- From:
- 20/12/2023
- Name:
- Merck Patent GmbH
- Address:
- Frankfurter Strasse 250, 64293 DARMSTADT, Germany (DE)
Inventor
1
- Name:
- RAHMAN, M. Dalil
- Address:
- Branchburg, New Jersey 08876, United States of America (US)
2
- Name:
- MULLEN, Salem K.
- Address:
- Branchburg, New Jersey 08876, United States of America (US)
3
- Name:
- CHO, JoonYeon
- Address:
- Branchburg, New Jersey 08876, United States of America (US)
Priority
- Priority Patent Number:
- 201962871346 P
- Priority Date:
- 08/07/2019
- Priority Country:
- United States of America (US)
Classification
- IPC or IDT classification:
- G03F 7/42; G03F 7/09; H01L 21/02; H01L 21/027; H01L 21/311;
Publication
Bulletin
1
- Bulletin Heading:
- VRV
- Journal edition number:
- 17/24
- Publication date:
- 24/04/2024
- Description:
- Lapse or annulment
2
- Bulletin Heading:
- EP2
- Journal edition number:
- 51/23
- Publication date:
- 20/12/2023
- Description:
- European patents granted for the Netherlands
European Patent Bulletin
- Issue number:
- 202351
- Publication date:
- 20/12/2023
- Description:
- Grant (B1)
Annual Fee
- Annual Fee(s) Due Date:
- Annual Fee Number:
- Last Annual Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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