Patent details
EP3440690 Title: ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN THE PRODUCTION OF WAFERS
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Basic Information
- Publication number:
- EP3440690
- WO Application Number:
- EP2017058018
- Type:
- European Patent Granted for NL
- Status:
- Deemed not to be granted according to art. 52.4a or 52.6 ROW
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Application number:
- EP17717106.3
- WO Publication Number:
- WO2017174597
- EPO Publication Language:
- German
- SPC Number:
- First Applicant Residence Country:
- Germany (DE)
- Publications:
Dates
- Filing date:
- 04/04/2017
- Grant date:
- 11/08/2021
- EP Publication Date:
- 13/02/2019
- WO Publication Date:
- 12/10/2017
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 11/08/2021
- EP B1 Publication Date:
- 11/08/2021
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 03/04/2037
- Lapsed By Expiration Date:
- Revocation Date:
- Invalidity Date:
- 11/08/2021
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
Applicant/holder
- From:
- 11/08/2021
- Name:
- mi2-factory GmbH
- Address:
- Moritz-von-Rohr-Str. 1a, 07745 Jena, Germany (DE)
Inventor
1
- Name:
- KRIPPENDORF, Florian
- Address:
- 07743 Jena, Germany (DE)
2
- Name:
- CSATO, Constantin
- Address:
- 95236 Stammbach, Germany (DE)
Priority
- Priority Patent Number:
- 102016106119
- Priority Date:
- 04/04/2016
- Priority Country:
- Germany (DE)
Classification
- IPC or IDT classification:
- H01J 37/317;
Publication
Bulletin
1
- Bulletin Heading:
- VRV
- Journal edition number:
- 50/21
- Publication date:
- 15/12/2021
- Description:
- Lapse or annulment
2
- Bulletin Heading:
- EP2
- Journal edition number:
- 32/21
- Publication date:
- 11/08/2021
- Description:
- European patents granted for the Netherlands
European Patent Bulletin
- Issue number:
- 202132
- Publication date:
- 11/08/2021
- Description:
- Grant (B1)
Annual Fee
- Annual Fee(s) Due Date:
- Annual Fee Number:
- Last Annual Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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