Patent details
EP3039484 Title: STABLE METAL COMPOUNDS AS HARDMASKS AND FILLING MATERIALS, THEIR COMPOSITIONS AND METHODS OF USE
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Basic Information
- Publication number:
- EP3039484
- WO Application Number:
- EP2014067749
- Type:
- European Patent Granted for NL
- Status:
- Deemed not to be granted according to art. 52.4a or 52.6 ROW
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Application number:
- EP14752886.3
- WO Publication Number:
- WO2015028371
- EPO Publication Language:
- English
- SPC Number:
- First Applicant Residence Country:
- Luxembourg (LU)
- Publications:
Dates
- Filing date:
- 20/08/2014
- Grant date:
- 18/07/2018
- EP Publication Date:
- 06/07/2016
- WO Publication Date:
- 05/03/2015
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 18/07/2018
- EP B1 Publication Date:
- 18/07/2018
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 19/08/2034
- Lapsed By Expiration Date:
- Revocation Date:
- Invalidity Date:
- 18/07/2018
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
Applicant/holder
- From:
- 18/07/2018
- Name:
- AZ Electronic Materials (Luxembourg) S.à.r.l.
- Address:
- 46 Place Guillaume ll, 1648 Luxembourg, Luxembourg (LU)
Inventor
1
- Name:
- YAO, Huirong
- Address:
- Plainsboro, New Jersey 08536, United States of America (US)
2
- Name:
- MULLEN, Salem K.
- Address:
- Florham Park, New Jersey 07932, United States of America (US)
3
- Name:
- WOLFER, Elizabeth
- Address:
- Bethlehem, Pennsylvania 08807, United States of America (US)
4
- Name:
- MCKENZIE, Douglas
- Address:
- Easton, Pennsylvania 18045, United States of America (US)
5
- Name:
- CHO, JoonYeon
- Address:
- Bridgewater, New Jersey 08807, United States of America (US)
6
- Name:
- PADMANABAN, Munirathna
- Address:
- Bridgewater, New Jersey 08807, United States of America (US)
Priority
- Priority Patent Number:
- 201314015222
- Priority Date:
- 30/08/2013
- Priority Country:
- United States of America (US)
Classification
- IPC or IDT classification:
- C08G 77/58; C08G 79/00; G03F 7/09; H01L 21/027;
Publication
Bulletin
1
- Bulletin Heading:
- VRV
- Journal edition number:
- 48/18
- Publication date:
- 21/11/2018
- Description:
- Lapse or annulment
2
- Bulletin Heading:
- EP2
- Journal edition number:
- 30/18
- Publication date:
- 18/07/2018
- Description:
- European patents granted for the Netherlands
European Patent Bulletin
- Issue number:
- 201829
- Publication date:
- 18/07/2018
- Description:
- Grant (B1)
Annual Fee
- Annual Fee(s) Due Date:
- Annual Fee Number:
- Last Annual Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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