Patent details
EP1481288 Title: REDUCED STRIAE EXTREME ULTRAVIOLET LITHOGRAPHIC ELEMENTS AND A METHOD OF MANUFACTURING THE SAME.
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Basic Information
- Publication number:
- EP1481288
- WO Application Number:
- Type:
- European Patent Granted for NL
- Status:
- Expired. Art. 36.6 ROW
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Application number:
- EP03744207.6
- WO Publication Number:
- EPO Publication Language:
- English
- SPC Number:
- First Applicant Residence Country:
- United States of America (US)
- Publications:
Dates
- Filing date:
- 04/03/2003
- Grant date:
- 05/05/2010
- EP Publication Date:
- 05/05/2010
- WO Publication Date:
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 05/05/2010
- EP B1 Publication Date:
- 05/05/2010
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- 03/08/2010
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 03/03/2023
- Lapsed By Expiration Date:
- 04/03/2023
- Revocation Date:
- Invalidity Date:
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
Applicant/holder
- From:
- 05/05/2010
- Name:
- Corning Incorporated
- Address:
- 1 Riverfront Plaza, 14831, CORNING, NEW YORK, United States of America (US)
Domicile Holder
- Name:
- ir. H.A. Witmans c.s.
- From:
- 05/05/2010
- Address:
- V.O. Postbus 87930, 2508 DH, Den Haag, Netherlands (NL)
- To:
Inventor
1
- Name:
- HRDINA, Kenneth E
- Address:
- HORSEHEADS, NY 14845, United States of America (US)
2
- Name:
- MAXON, John E
- Address:
- CANTON, NY 13617, United States of America (US)
3
- Name:
- MCLEAN, Brent R
- Address:
- CANTON, NY 13617, United States of America (US)
Priority
- Priority Patent Number:
- 362052 P
- Priority Date:
- 05/03/2002
- Priority Country:
- United States of America (US)
Classification
- Main IPC Class:
- G03F 7/20;
Publication
Bulletin
1
- Bulletin Heading:
- VRV
- Journal edition number:
- 10/23
- Publication date:
- 08/03/2023
- Description:
- Lapse or annulment
2
- Bulletin Heading:
- VB2
- Journal edition number:
- 2014/40
- Publication date:
- 01/10/2014
- Description:
- Requests for restoration and notices of objection, notices of objection to Court, notices of objection to appelate court ex NL Patent Law 1995 in respect of which a decision has been taken. Opposition(s) decisions ex European Patent Convention
3
- Bulletin Heading:
- VB1
- Journal edition number:
- 2011/12
- Publication date:
- 23/03/2011
- Description:
- Requests for restoration and notices of objection, notices of objection to Court, notices of objection to appelate court ex NL Patent Law 1995. Opposition(s) filed ex European Patent Convention
4
- Bulletin Heading:
- EP3
- Journal edition number:
- 2010/25
- Publication date:
- 11/08/2010
- Description:
- European patents granted for the Netherlands in which a translation was filed ex Article 52 par. 1 of the NL Patent Law 1995
5
- Bulletin Heading:
- EP2
- Journal edition number:
- 2010/12
- Publication date:
- 06/05/2010
- Description:
- European patents granted for the Netherlands
European Patent Bulletin
1
- Issue number:
- 201439
- Publication date:
- 24/09/2014
- Description:
- Opposition rejected; Patent maintained as granted
2
- Issue number:
- 201111
- Publication date:
- 16/03/2011
- Description:
- Opposition procedure started
3
- Issue number:
- 201018
- Publication date:
- 05/05/2010
- Description:
- Grant (B1)
Annual Fee
- Annual Fee(s) Due Date:
- Annual Fee Number:
- Last Annual Payment Date:
- 17/02/2022
- Last Annual Fee Paid Number:
- 20
- Last Annual Fee Paid Amount:
- 1400 Euro
- Payer:
- Master Data Center
| Filing date | Document type | Document Description | Number of pages | File Type | ||
|---|---|---|---|---|---|---|
| 03/08/2010 | Claims | Translated claims | 3 | /7/0/2/4/4/0503744207/docs/ep03744207.6_1_claims20100803.pdf | ||
| 04/05/2010 | Incoming Correspondence Paper | Other | 1 | /7/0/2/4/4/0503744207/docs/ep03744207.6_0_incomingcorrespondencepaper20100504.pdf |