Patent details
EP2742167 Title: METHOD AND APPARATUS FOR DEPOSITING ATOMIC LAYERS ON A SUBSTRATE
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Basic Information
- Publication number:
- EP2742167
- WO Application Number:
- NL2012050540
- Type:
- European Patent Granted for NL
- Status:
- Patent in Force
- Publication Title:
- Title When Made Available For Viewing:
- Reason Lapsed:
- Application number:
- EP12748571.2
- WO Publication Number:
- WO2013022339
- EPO Publication Language:
- English
- SPC Number:
- First Applicant Residence Country:
- Netherlands (NL)
- Publications:
Dates
- Filing date:
- 30/07/2012
- Grant date:
- 17/10/2018
- EP Publication Date:
- 18/06/2014
- WO Publication Date:
- 14/02/2013
- Claims Translations Received Date:
- Claims Translation B1 Received Date:
- 11/01/2019
- Claims Translation B2 Received Date:
- Claims Translation B3 Received Date:
- Lapsed By Non Payment Annual Fee Date:
- Renunciation Date:
- NullificationDate:
- Published:
- Due To Cession Date:
- Registration date:
- 17/10/2018
- EP B1 Publication Date:
- 17/10/2018
- EP B2 Publication Date:
- EP B3 Publication Date:
- Description Translation B1 Received Date:
- Description Translation B2 Received Date:
- Description Translation B3 Received Date:
- Expiration date:
- 29/07/2032
- Lapsed By Expiration Date:
- Patent Validated Date:
- 12/02/2019
- Revocation Date:
- Invalidity Date:
- Response To Novelty Search Report Received:
- Patent Granting Request:
- Lapsed date:
Applicant/holder
- From:
- 17/10/2018
- Name:
- Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
- Address:
- Anna van Buerenplein 1, 2595 DA, 'S-GRAVENHAGE, Netherlands (NL)
Agent
- Name:
- ir. H.A. Witmans c.s.
- From:
- 11/02/2019
- Address:
- V.O. Postbus 87930, 2508 DH, Den Haag, Netherlands (NL)
- To:
Inventor
1
- Name:
- KNAAPEN, Raymond Jacobus Wilhelmus
- Address:
- NL-2628 VK Delft, Netherlands (NL)
2
- Name:
- OLIESLAGERS, Ruud
- Address:
- NL-2628 VK Delft, Netherlands (NL)
3
- Name:
- VAN DEN BERG, Dennis
- Address:
- NL-2628 VK Delft, Netherlands (NL)
4
- Name:
- VAN DEN BOER, Matijs C.
- Address:
- NL-2628 VK Delft, Netherlands (NL)
5
- Name:
- MAAS, Diederik Jan
- Address:
- NL-2628 VK Delft, Netherlands (NL)
6
- Name:
- VAN DER DONCK, Jacques Cor Johan
- Address:
- NL-2628 VK Delft, Netherlands (NL)
7
- Name:
- ROOZEBOOM, Freddy
- Address:
- NL-2628 VK Delft, Netherlands (NL)
Priority
- Priority Patent Number:
- 11177166
- Priority Date:
- 10/08/2011
- Priority Country:
- European Patent Office (EPO) (EP)
Classification
- IPC or IDT classification:
- C23C 16/44; C23C 16/455; C23C 16/458; C23C 16/52; C23C 16/54;
Publication
Bulletin
1
- Bulletin Heading:
- EP3
- Journal edition number:
- 07/19
- Publication date:
- 13/02/2019
- Description:
- Contains data concerning European patents granted for The Netherlands in which a translation was filed confirm Article 52 par. 1 or 6 of the Patents Act 1995
2
- Bulletin Heading:
- EP2
- Journal edition number:
- 43/18
- Publication date:
- 17/10/2018
- Description:
- Contains data concerning European patents granted for The Netherlands
European Patent Bulletin
- Issue number:
- 201842
- Publication date:
- 17/10/2018
- Description:
- Grant (B1)
Annual Fee
- Annual Fee(s) Due Date:
- 31/07/2024
- Annual Fee Number:
- 13
- Annual Fee Amount:
- 700 Euro
- Last Annual Payment Date:
- 19/07/2023
- Last Annual Fee Paid Number:
- 12
- Last Annual Fee Paid Amount:
- 600 Euro
- Payer:
- Dennemeyer and Co
| Filing date | Document type | Document Description | Number of pages | ||
|---|---|---|---|---|---|
| 11/02/2019 | Outgoing Correspondence | Letter no formal defects | 1 | /6/9/4/7/2/0800327496/docs/ep12748571.2_1_253820l271.pdf | |
| 11/01/2019 | Claims | First filed claims | 6 | /6/9/4/7/2/0800327496/docs/ep12748571.2_0_claims20190111151643005.pdf |